Shenzhen Wofly Technology Co., Ltd.
Shenzhen Wofly Technology Co., Ltd.
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Special gas holder (GC)
The special gas transmission cabinet is a supply system specially designed for the supply of flammable, explosive, corrosive, toxic and other dangerous gases. It can be divided into full-automatic, semi-automatic and manual operation according to categories. The basic functions include automatic purging, automatic switching and automatic safety cut-off in case of emergency (when the set alarm signal is triggered). The full-automatic gas holder is controlled by PLC, and the touch screen is the human-machine interface. Through the pressure sensor, pneumatic valve, flow meter and other devices installed in the equipment, the safe and effective operation of the equipment is realized. The safety interlock function of its internal PLC program design and the reasonable selection and layout of high-purity valves not only meet the requirements of continuous supply of special gas and high purity in the production process of semiconductor technology, but also ensure the normal production of the factory and the personal safety of employees.
Applicable gases
flammable, corrosive and toxic gases, such as SiH4, NF3, NH3, N2O, HCl, etc.
Applicable industries
semiconductor, TFT, sun solar, led and other factories.
Basic configuration of panel:
High pressure diaphragm valve
High pressure exhaust valve
Purge gas isolation valve
Low pressure exhaust valve
Low pressure diaphragm valve
Check valve Vacuum generator
Regulator Pressure gauge
First stage gasket filter
Secondary filter
Panel optional configuration:
High pressure N2 valve
Emergency shut-off valve
Test port valve
Safety valve
Excess flow switch
Indicating pressure switch
PT
FAQ
Q. What is your terms of packing?
A: Export standard.
Q. What is your terms of payment?
A: T/T ,PayPal, Western Union.
Q. What is your terms of delivery?
A: EXW.
Q. Can you produce according to the samples?
A: Yes, we can produce by your samples or technical drawings. We can build the molds and fixtures.
Q. Do you test all your goods before delivery?
A: Yes, we have 100% test before delivery
Q: How do you make our business long-term and good relationship?
A1. We keep good quality and competitive price to ensure our customers benefit ;
A2. We respect every customer as our friend and we sincerely do business and make friends with them,no matter where they come from.